Talk: Plasma Process Simulation

(c) Tokyo Electron

On Monday the 6. of July Dr. Peter Ventzek from Tokyo Electron America is giving a talk on "Plasma process simulation: role in process and equipment development". The talk starts at 4 pm, in room ID 03/463. All interested are highly welcome. 

Dr. Peter Ventzek is a Member of Technical Staff with Tokyo Electron (TEL) America where he is responsible for plasma process modeling and simulation. His research dealt with plasma process control, laser ablation, neutral beam sources and atmospheric pressure discharges. Dr. Ventzek has published over 60 journal articles.